   u0i OPC UA_1    R  S T   U  V  W Y    "Z  u\ 
 .   ןX   Y   Z   [  \  ]   H  12;#144115188075855873="15.0.10.0"#15=""#68="True"P  OPC UA   B@ |  
        :      3 4  5 8  7 86 t/ h. "SIMATIC.S7-1500.OPC-UAServer:PLC_1?@ UB      UB                 :UB  4         
  '        d           ' ]   1 	2O1<ղxw'D޷}f2